Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/26/2005
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Application #:
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10128907
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Filing Dt:
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04/23/2002
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Inventors:
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Yung-Hee Yvette Lee, Shashank Deshmukh
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Title:
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ETCHING METHOD HAVING HIGH SILICON-TO-PHOTORESIST SELECTIVITY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| LEGAL AFFAIRS DEPARTMENT, MS/2061 |
| P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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