Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/02/2005
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Application #:
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10219995
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Filing Dt:
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08/14/2002
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Publication #:
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Pub Dt:
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04/29/2004
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Inventors:
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Yousun Kim Taylor, Wendy Nguyen, Chris G.N. Lee
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Title:
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METHOD AND COMPOSITIONS FOR HARDENING PHOTORESIST IN ETCHING PROCESSES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BEYER WEAVER & THOMAS, LLP |
| MICHAEL LEE |
| P.O. BOX 778 |
| BERKELEY, CA 94704-0778 |
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