Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/02/2005
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Application #:
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09574008
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Filing Dt:
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05/19/2000
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Inventors:
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Hiroji Hanawa, Nils Johansson, Boguslaw Swedek, Manoocher Birang
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Title:
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METHOD AND APPARATUS FOR MONITORING A METAL LAYER DURING CHEMICAL MECHANICAL POLISHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PO BOX 450A, M/S #2061 |
| LEGAL AFFAIRS DEPARTMENT |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| P.O. BOX 450A |
| M/S 2061 |
| SANTA CLARA, CA 95052 |
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