Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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08/16/2005
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Application #:
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10894044
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Filing Dt:
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07/20/2004
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Publication #:
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Pub Dt:
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02/17/2005
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Inventors:
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Chie Shishido, Hidetoshi Morokuma, Yuki Ojima, Maki Tanaka, Wataru Nagatomo
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Title:
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METHOD OF MONITORING AN EXPOSURE PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 24-14 NISHISHINBASHI, 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| MELVIN KRAUS |
| 1300 NORTH SEVENTEENTH STREET |
| SUITE 1800 |
| ARLINGTON, VA 22209 |
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Assignment:
2
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CHANGE OF NAME AND ADDRESS
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| 17-1, TORANOMON 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| MATTINGLY & MALUR PC |
| 1800 DIAGONAL ROAD |
| SUITE 210 |
| ALEXANDRIA, VA 22314 |
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