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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
08/23/2005
Application #:
10261514
Filing Dt:
09/30/2002
Inventors:
Ramkumar Subramanian, Steven C. Avanzino, Bharath Rangarajan, Bhanwar Singh
Title:
COPPER OXIDE MONITORING BY SCATTEROMETRY/ELLIPSOMETRY DURING NITRIDE OR BLOK REMOVAL IN DAMASCENE PROCESS
Assignment: 1
Reel/Frame:
013357/0182Recorded: 09/30/2002Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
09/12/2002
Exec Dt:
09/12/2002
Exec Dt:
09/23/2002
Exec Dt:
09/12/2002
Assignee:
ONE AMD PLACE
P.O. BOX 3453
SUNNYVALE, CALIFORNIA 94088-3453
Correspondent:
AMIN & TUROCY, LLP
HIMANSHU S. AMIN
24TH FLOOR, NATIONAL CITY CETNER
1900 E. 9TH STREET
CLEVELAND, OH 44114

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