Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/30/2005
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Application #:
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10113151
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Filing Dt:
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03/28/2002
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Inventors:
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Rodney Kistler, David J. Hemker, Yehiel Gotkis, Aleksander Owezarz, Bruno Morel et al
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Title:
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APPARATUS AND METHODS FOR DETECTING TRANSITIONS OF WAFER SURFACE PROPERTIES IN CHEMICAL MECHANICAL POLISHING FOR PROCESS STATUS AND CONTROL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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MARTINE & PENILLA, LLP |
CHESTER E. MARTINE, JR. |
710 LAKEWAY DRIVE |
SUITE 170 |
SUNNYVALE, CA 94085 |
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