Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/20/2005
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Application #:
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10424906
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Filing Dt:
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04/29/2003
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Publication #:
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Pub Dt:
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01/01/2004
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Inventors:
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Takashi Shimizu, Akihito Yamamoto
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Title:
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APPARATUS FOR AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE, AND CLEANING METHOD FOR USE IN THE APPARATUS FOR MANUFACTURING A SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO 105-8001, JAPAN |
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| FINNEGAN, HENDERSON, FARABOW, GARRETT & |
| DUNNER, L.L.P. |
| MR. ERNEST F. CHAPMAN |
| 1300 I STREET, N.W. |
| WASHINGTON, D.C. 20005-3315 |
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