Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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09/27/2005
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Application #:
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09994279
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Filing Dt:
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11/26/2001
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Publication #:
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Pub Dt:
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06/06/2002
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Inventors:
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Tony P. Chiang, Karl F. Leeser
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Title:
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METHOD FOR INTEGRATED IN-SITU CLEANING AND SUBSEQUENT ATOMIC LAYER DEPOSITION WITHIN A SINGLE PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3350 SCOTT BOULEVARD #62 |
| SANTA CLARA, CALIFORNIA 95054 |
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| BRADLEY W. SCHEER |
| 2225 EAST BAYSHORE ROAD |
| SUITE 200 |
| PALO ALTO, CA 94303 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4000 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| PATENT LAW GROUP LLP |
| BRIAN D. OGONOWSKY |
| 2635 NORTH FIRST STREET |
| SUITE 223 |
| SAN JOSE, CA 95134 |
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