Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/27/2005
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Application #:
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10738360
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Filing Dt:
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12/16/2003
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Inventors:
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Yu Cheng, Helen Zhu, Vinay V. Phoray, Hanzhong Xiao, Peter K. Loewenhardt
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Title:
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METHODS AND APPARATUS FOR THE OPTIMIZATION OF PHOTO RESIST ETCHING IN A PLASMA PROCESSING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| IPSG, P.C. |
| ALEXANDER SOUSA |
| P.O. BOX 700640 |
| SAN JOSE, CALIFORNIA 95170-0640 |
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