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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
6955211
Issue Dt:
10/18/2005
Application #:
10197683
Filing Dt:
07/17/2002
Publication #:
20040011504
Pub Dt:
01/22/2004
Inventors:
Vincent W. Ku, Ling Chen, Dien-Yeh Wu, Alan H. Ouye, Irena Wysok
Title:
METHOD AND APPARATUS FOR GAS TEMPERATURE CONTROL IN A SEMICONDUCTOR PROCESSING SYSTEM
Assignment: 1
Reel/Frame:
013422/0600Recorded: 10/21/2002Pages: 11
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
KU, VINCENT W.
Exec Dt:
09/22/2002
CHEN, LING
Exec Dt:
10/07/2002
WU, DIEN-YEH
Exec Dt:
09/13/2002
OUYE, ALAN H.
Exec Dt:
09/12/2002
WYSOK, IRENA
Exec Dt:
09/30/2002
Assignee:
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE
P.O. BOX 450A
SANTA CLARA, CALIFORNIA 95054
Correspondent:
APPLIED MATERIALS, INC.
ROBERT W. MULCAHY
P.O. BOX 450A
PATENT COUNSEL
SANTA CLARA, CA 95052

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