Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/08/2005
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Application #:
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09820694
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Filing Dt:
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03/30/2001
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Publication #:
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Pub Dt:
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12/05/2002
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Inventors:
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Helen H. Zhu, David R. Pirkle, S.M. Reza Sadjadi, Andrew S. Li
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Title:
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METHOD OF PLASMA ETCHING SILICON NITRIDE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BURNS, DOANE, SWECKER & MATHIS, L.L.P. |
| PETER K. SKIFF |
| P.O. BOX 1404 |
| ALEXANDRIA, VIRGINIA 22313-1404 |
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