Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/29/2005
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Application #:
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10246926
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Filing Dt:
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09/18/2002
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Inventors:
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SiYi Li, S.M. Reza Sadjadi, Sean S. Kang
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Title:
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ETCHING A DIELECTRIC LAYER IN AN INTEGRATED CIRCUIT STRUCTURE HAVING A METAL HARD MASK LAYER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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LAM RESEARCH CORPORATION |
MICHAEL S. BRANDT |
4650 CUSHING PARKWAY, CA-1 |
FREMONT, CA 94538 |
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