Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
|
Issue Dt:
|
12/06/2005
|
Application #:
|
10131083
|
Filing Dt:
|
04/25/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/31/2002
| | | | |
|
Inventors:
|
Kazuya Sato, Soichi Inoue, Satoshi Tanaka
|
|
Title:
|
MEASURING METHOD OF ILLUMINANCE UNEVENNESS OF EXPOSURE APPARATUS, CORRECTING METHOD OF ILLUMINANCE UNEVENNES, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, AND EXPOSURE APPARATUS
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| 1-1 SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
|
|
|
|
| FINNEGAN, HENDERSON, FARABOW, ET AL |
| MR. ERNEST F. CHAPMAN |
| 1300 I STREET, N.W. |
| WASHINGTON, D.C. 20005-3315 |
|
|
Search Results as of:
04/30/2024 06:56 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
