Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/27/2005
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Application #:
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10813913
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Filing Dt:
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03/30/2004
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Inventors:
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Jisoo Kim, Sangheon Lee, Sean Kang, Binet Worsham, Bi-Ming Yen, Reza Sadjadi et al
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Title:
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METHODS AND APPARATUS FOR INSPECTING CONTACT OPENINGS IN A PLASMA PROCESSING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| IPSG, P.C. |
| P.O. BOX 700640 |
| SAN JOSE, CA 95170-0640 |
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