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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
01/17/2006
Application #:
10446328
Filing Dt:
05/27/2003
Publication #:
Pub Dt:
11/27/2003
Inventor:
Yoshiharu Nakamura
Title:
GAS SUPPLY UNIT, GAS SUPPLY METHOD AND EXPOSURE SYSTEM
Assignment: 1
Reel/Frame:
014123/0959Recorded: 05/27/2003Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
05/21/2003
Assignee:
3-30-2, SHIMOMARUKO
OHTA-KU
TOKYO, JAPAN
Correspondent:
MORGAN & FINNEGAN, LLP
JOSEPH A. CLAVARUSO
345 PARK AVENUE
NEW YORK, NY 10154

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