Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/31/2006
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Application #:
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10342645
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Filing Dt:
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01/15/2003
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Publication #:
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Pub Dt:
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07/15/2004
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Inventors:
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Takenao Nemoto, Emmanuel Guidotti, Gert Leusink
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Title:
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METHOD AND APPARATUS FOR REMOVING MATERIAL FROM CHAMBER AND WAFER SURFACES BY HIGH TEMPERATURE HYDROGEN-CONTAINING PLASMA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6 AKASAKA 5-CHOME, MINATO-KU |
| TBS BROADCAST CENTER |
| TOKYO 107, JAPAN |
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| WOOD, HERRON & EVANS, L.L.P. |
| KRISTI L. DAVIDSON, ESQ. |
| 2700 CAREW TOWER |
| 441 VINE STREET |
| CINCINNATI, OH 45202 |
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