Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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02/21/2006
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Application #:
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09873230
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Filing Dt:
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06/04/2001
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Publication #:
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Pub Dt:
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05/02/2002
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Inventors:
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Norbert Benesch, Claus Schneider, Lothar Pfitzner
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Title:
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METHOD AND DEVICE FOR OPTICALLY MONITORING FABRICATION PROCESSES OF FINELY STRUCTURED SURFACES IN A SEMICONDUCTOR PRODUCTION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| MANFRED VON ARDENNE-RING 20 |
| DRESDEN, GERMANY 01099 |
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| LEONRODTSTRASSE 54 |
| MUNCHEN, GERMANY 80636 |
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| LERNER AND GREENBERG |
| P.O. BOX 2480 |
| HOLLYWOOD, FL 33022 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| GUSTAV-HEINEMANN-RING 212 |
| MUNICH, GERMANY 81739 |
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| JONATHAN BOCKMAN |
| C/O MORRISON AND FOERSTER LLP1 |
| 1650 TYSONS BLVD. SUITE 400 |
| MCLEAN, VA 22102 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AM CAMPEON 1-12 |
| NEUBIBERG, GERMANY 85579 |
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| CPA GLOBAL LIMITED |
| LIBERATION HOUSE |
| CASTLE STREET |
| ST HELIER, JE1 1BL JERSEY |
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