Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/28/2006
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Application #:
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10885666
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Filing Dt:
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07/08/2004
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Publication #:
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Pub Dt:
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01/13/2005
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Inventors:
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Masato Muraki, Hiroya Ohta, Osamu Kamimura
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Title:
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CHARGED PARTICLE BEAM EXPOSURE APPARATUS, CHARGED PARTICLE BEAM EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD USING THE SAME APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-30-2, SHIMOMARUKO, OHTA-KU |
| TOKYO, JAPAN |
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| 24-14, NISHISHINBASHI 1-CHOME |
| MINATO-KU |
| TOKYO, JAPAN |
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| FITZPATRICK, CELLA, HARPER & SCINTO |
| 30 ROCKEFELLER PLAZA |
| NEW YORK, NY 10112-3801 |
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