Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/28/2006
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Application #:
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10625451
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Filing Dt:
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07/23/2003
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Publication #:
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Pub Dt:
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08/26/2004
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Inventors:
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Jan Raebiger, Heiko Wagner, Uwe Schulze, Rolf Seltmann
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Title:
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METHOD AND SYSTEM FOR IMPROVING EXPOSURE UNIFORMITY IN A STEP AND REPEAT PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5204 E. BEN WHITE BLVD. |
| AUSTIN, TEXAS 78741 |
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| WILLIAMS, MORGAN & AMERSON, P.C. |
| J. MIKE AMERSON |
| 10333 RICHMOND, SUITE 1100 |
| HOUSTON, TX 77042 |
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