Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/07/2006
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Application #:
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10358852
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Filing Dt:
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02/04/2003
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Publication #:
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Pub Dt:
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08/05/2004
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Inventors:
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Andreas Norbert Wiswesser, Manoocher Birang, Boguslaw A. Swedek
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Title:
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SUBSTRATE MONITORING DURING CHEMICAL MECHANICAL POLISHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| LEGAL AFFAIRS DEPARTMENT- M/S 2061 |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| P.O. BOX 450A, PATENT COUNSEL |
| LEGAL AFFAIRS DEPT- M/S 2061 |
| SANTA CLARA, CA 95052 |
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