Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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03/21/2006
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Application #:
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10144961
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Filing Dt:
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05/14/2002
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Publication #:
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Pub Dt:
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11/21/2002
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Inventors:
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Erik Schaffer, Jurgen Mlynek, Ullrich Steiner, Thomas Thurn-Albrecht, Thomas P. Russell
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Title:
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METHODS AND APPARATUS FOR FORMING SUBMICRON PATTERNS ON FILMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE BEACON STREET |
| 26TH FLOOR |
| BOSTON, MASSACHUSETTS 02108 |
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| MARC M. WEFERS |
| FISH & RICHARDSON P.C. |
| 225 FRANKLIN STREET |
| BOSTON, MA 02110 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| UNIVERSITATSSTRASSE 10 |
| 78464 KONSTANZ, GERMANY |
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| ONE BEACON STREET, 26TH FLOOR |
| BOSTON, MASSACHUSETTS 02108 |
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| MARC M. WEFERS |
| FISH & RICHARDSON P.C. |
| 225 FRANKLIN STREET |
| BOSTON, MA 02110 |
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