Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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04/04/2006
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Application #:
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10380428
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Filing Dt:
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03/14/2003
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Publication #:
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Pub Dt:
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05/20/2004
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Inventors:
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Takanori Mimura, Kazuya Nagaseki, Itsuko Sakai, Tokuhisa Ohiwa
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Title:
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HIGH SPEED SILICON ETCHING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| 1-1, SHIBAURA 1-CHOME |
| MINATO-KU |
| TOKYO 105-8001, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, ET. AL. |
| C. IRVIN MCCLELLAND |
| 1940 DUKE STREET |
| ALEXANDRIA, VIRGINIA 22314 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, SHIBAURA 1-CHOME |
| MINATO-KU |
| TOKYO, JAPAN 105-0023 |
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| OBLON, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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