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Patent Assignment Abstract of Title

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Total Assignments: 4

Patent #:	7027226	Issue Dt:	04/11/2006	Application #:	09956160	Filing Dt:	09/17/2001
Publication #:	20030081316	Pub Dt:	05/01/2003
Inventors:	Kenneth Alan Goldberg, Patrick P. Naulleau
Title:	DIFFRACTIVE OPTICAL ELEMENT FOR EXTREME ULTRAVIOLET WAVEFRONT CONTROL

Assignment: 1

Reel/Frame:

012196/0380

Recorded: 09/17/2001

Pages: 3

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

GOLDBERG, KENNETH ALAN

Exec Dt:

07/23/2001

NAULLEAU, PATRICK P.

Exec Dt:

07/23/2001

Assignee:

REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE

1111 FRANKLIN STREET

OAKLAND, CALIFORNIA 94607

Correspondent:

BURNS, DOANE, SWECKER & MATHIS, L.L.P.

WILLIAM H. BENZ

P.O. BOX 1404

ALEXANDRIA, VA 22313-1404

Assignment: 2

Reel/Frame:

014686/0470

Recorded: 11/14/2003

Pages: 4

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

GOLDBERG, KENNETH ALAN

Exec Dt:

11/03/2003

NAULLEAU, PATRICK P.

Exec Dt:

11/03/2003

Assignee:

REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE

1111 FRANKLIN STREET

OAKLAND, CALIFORNIA 94607-5200

Correspondent:

FLIESLER DUBB MEYER & LOVEJOY LLP

CHARLES H. JEW

FOUR EMBARCADERO CENTER, FOURTH FLOOR

SAN FRANCISCO, CA 94111

Assignment: 3

Reel/Frame:

015552/0067

Recorded: 07/12/2004

Pages: 8

Conveyance:

CORRECTIVE ASSIGNMENT TO CORRECT SERIAL NUMBER 09632831, 09099389 AND 09956180 NUMBER SHOULD BE 09632631, 09627533 AND 09956160. PREVIOUSLY RECORDED ON REEL 014601 FRAME 0343.

Assignor:

REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE

Exec Dt:

12/17/2003

Assignee:

EUV LLC

2200 MISSION COLLEGE BLVD.

INTEL CORPORATION MAIL STOP SC1-01

SANTA CLARA, CALIFORNIA 95054

Correspondent:

FLIESLER MEYER LLP

CHARLES H. JEW

FOUR EMBARADERO CENTER

FOURTH FLOOR

SAN FRANCISCO, CA 94111

Assignment: 4

Reel/Frame:

018448/0846

Recorded: 10/25/2006

Pages: 3

Conveyance:

CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).

Assignor:

REGENTS OF THE UNIVERSITY OF CALIFORNIA

Exec Dt:

06/26/2006

Assignee:

ENERGY, UNITED STATES DEPARTMENT

1000 INDEPENDENCE AVENUE, S.W.

WASHINGTON, DISTRICT OF COLUMBIA 20585

Correspondent:

ROBERT J. FISHER

U.S. DEPARTMENT OF ENERGY

INTELLECTUAL PROPERTY LAW DIVISION

9800 SOUTH CASS AVENUE

ARGONNE, ILLINOIS 60439

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