Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/02/2006
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Application #:
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11012293
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Filing Dt:
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12/16/2004
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Publication #:
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Pub Dt:
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07/21/2005
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Inventors:
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Nobuya Hayashi, Shinichiro Narui, Hidekazu Okamoto, Masaaki Tsuzaki
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Title:
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METHOD FOR CLEANING CHAMBER OF DEPOSITION APPARATUS FOR ORGANIC EL DEVICE PRODUCTION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 12-1, YURAKUCHO 1-CHOME, CHIYODA-KU |
| TOKYO 100-8405, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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