Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/09/2006
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Application #:
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10371603
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Filing Dt:
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02/20/2003
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Publication #:
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Pub Dt:
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08/26/2004
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Inventors:
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John M. Boyd, Michael Ravkin, Fred C. Redeker
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Title:
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METHOD AND APPARATUS FOR MEGASONIC CLEANING OF PATTERNED SUBSTRATES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PAKRWAY |
FREMONT, CALIFORNIA 94538 |
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MARTINE & PENILLA, LLP |
MICHAEL L. GENCARELLA |
710 LAKEWAY DRIVE, SUITE 170 |
SUNNIVALE , CA 94085 |
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