Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/09/2006
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Application #:
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10431782
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Filing Dt:
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05/08/2003
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Publication #:
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Pub Dt:
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11/13/2003
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Inventors:
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Shinichi Hamaguchi, Susumu Goto, Osamu Kamimura, Yasunari Sohda
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Title:
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ELECTRON BEAM EXPOSURE APPARATUS AND ELECTRON BEAM PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-32-1, ASAHI-CHO, NERIMA-KU |
| TOKYO 179-0071, JAPAN |
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| 30-2, 3-CHOME, SHIMOMARUKO, OHTA-KU |
| TOKYO, JAPAN |
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| 6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU |
| TOKYO 101-8010, JAPAN |
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| MORRISON & FOERSTER LLP |
| DAVID L. FEHRMAN |
| 555 WEST FIFTH STREET |
| SUITE 3500 |
| LOS ANGELES, CALIFORNIA 90013-1024 |
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