Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/09/2006
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Application #:
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10683566
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Filing Dt:
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10/10/2003
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Inventors:
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Stephen E. Hilliker, Anthony E. Sebastian, Yan Rubin, George Thomas
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Title:
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RF DELIVERY CONFIGURATION IN A PLASMA PROCESSING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4000 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| OKAMOTO & BENEDICTO LLP |
| PATRICK D. BENEDI CTO |
| P.O BOX 641330 |
| SAN JOSE, CA 95164-1330 |
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