Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/23/2006
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Application #:
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10713280
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Filing Dt:
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11/15/2003
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Publication #:
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Pub Dt:
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05/27/2004
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Inventors:
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Takahiro Yamaguchi, Masayoshi Ichikawa
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Title:
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POSITION DETECTION APPARATUS, POSITION DETECTION METHOD, ELECTRONIC PART CARRYING APPARATUS, AND ELECTRONIC BEAM EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-32, ASAHI-CHO 1-CHOME |
| NERIMA-KU |
| TOKYO, 179-0071, JAPAN |
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| MURAMATSU & ASSOCIATES |
| YASUO MURAMATSU |
| 7700 IRVINE CENTER DRIVE |
| IRVINE, CA 92618 |
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