Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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06/13/2006
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Application #:
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10506555
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Filing Dt:
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09/02/2004
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Publication #:
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Pub Dt:
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05/19/2005
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Inventors:
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Marco Wedowski, Frank Stietz, Bas Mertens, Roman Klein
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Title:
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DEVICE, EUV-LITHOGRAPHIC DEVICE AND METHOD FOR PREVENTING AND CLEANING CONTAMINATION ON OPTICAL ELEMENTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CARL-ZEISS-STRASSE 22 73447 |
| OBERKOCHEN, GERMANY |
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| HUDAK SHUNK & FARINE C. L.P.A. |
| DANIEL J. HUDAK, JR. |
| 2020 FRONT STREET |
| CUYAHOGA FALLS, CT 44221 |
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Assignment:
2
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| RUDOLF-EBER-STRASSE 2 |
| 73447 OBERKOCHEN, GERMANY |
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| TIMOTHY A. FRENCH |
| FISH & RICHARDSON P.C. |
| ONE MARINA PARK DRIVE |
| BOSTON, MASSACHUSETTS 02210-1878 |
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