Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/27/2006
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Application #:
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10995836
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Filing Dt:
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11/23/2004
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Publication #:
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Pub Dt:
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05/25/2006
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Inventors:
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Steven Richards, Julian G. Blake, Steven Campbell
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Title:
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POWER SAG DETECTION AND CONTROL IN ION IMPLANTING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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32A CHERRY HILL DRIVE |
DANVERS, MASSACHUSETTS 01923 |
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REZA MOLLAAGHABABA |
NUTTER MCCLENNEN & FISH LLP |
WORLD TRADE CENTER WEST |
155 SEAPORT BOULEVARD |
BOSTON, MA 02210-2604 |
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