Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/27/2006
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Application #:
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10456485
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Filing Dt:
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06/09/2003
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Publication #:
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Pub Dt:
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02/03/2005
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Inventors:
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Kenji Nishi, Masahiko Okumura, Hiroki Okuno
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Title:
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EXPOSURE APPARATUS AND STAGE DEVICE, AND DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO 100-8331, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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