Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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07/18/2006
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Application #:
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10654113
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Filing Dt:
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09/02/2003
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Inventors:
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Siswanto Sutanto, Wenxian Zhu, Waikit Fung, Mayasari Lim, Vishal Gauri et al
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Title:
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METHOD FOR CONTROLLING ETCH PROCESS REPEATABILITY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3970 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| BEYER WEAVER & THOMAS, LLP |
| JAMES E. AUSTIN |
| PO BOX 778 |
| BERKELEY, CA 94704-0778 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3970 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| BEYER WEAVER & THOMAS LLP |
| P.O. BOX 70250 |
| OAKLAND, CA 94612-0250 |
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