Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/18/2006
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Application #:
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10766665
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Filing Dt:
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01/27/2004
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Publication #:
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Pub Dt:
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11/11/2004
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Inventors:
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Young-Kwan Lee, Sang-Won Lee, Sae-Hoon Uhm
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Title:
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ANTENNA STRUCTURE FOR INDUCTIVELY COUPLED PLASMA GENERATOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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2326, SCHOOL OF NATURAL SCIENCE B/D KAIST |
373-1 KUSONG-DONG, YUSONG-GU |
305-701 DAEJEON, KOREA, REPUBLIC OF |
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ST.ONGE STEWARD JOHNSTON & REENS LLC |
WESLEY W. WHITMYER, JR. |
986 BEDFORD STREET |
STAMFORD, CT 06905-5619 |
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