Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/25/2006
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Application #:
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10445240
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Filing Dt:
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05/23/2003
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Publication #:
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Pub Dt:
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12/16/2004
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Inventors:
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Lin Zhang, Xiaolin Chen, DongQing Li, Thanh N. Pham, Farhad K. Moghadam, Zhuang Li et al
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Title:
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DEPOSITION-SELECTIVE ETCH-DEPOSITION PROCESS FOR DIELECTRIC FILM GAPFILL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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APPLIED MATERIALS |
PATENT COUNSEL |
P.O. BOX 450A |
SANTA CLARA, CA 95052 |
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