Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/08/2006
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Application #:
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10140618
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Filing Dt:
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05/06/2002
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Publication #:
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Pub Dt:
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11/06/2003
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Inventors:
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Arthur M. Howald, Andras Kuthi, Andrew D. Bailey III, Butch Berney
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Title:
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APPARATUS AND METHODS FOR MINIMIZING ARCING IN A PLASMA PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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LAM RESEARCH CORPORATION |
MICHAEL S. BRANDT |
4650 CUSHING PARKWAY, CA-1 |
FREMONT, CA 94538 |
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