Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/22/2006
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Application #:
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10742778
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Filing Dt:
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12/23/2003
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Publication #:
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Pub Dt:
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09/23/2004
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Inventor:
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Shinsuke Nishimura
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Title:
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DEMAGNIFICATION MEASUREMENT METHOD FOR CHARGED PARTICLE BEAM EXPOSURE APPARATUS, STAGE PHASE MEASUREMENT METHOD FOR CHARGED PARTICLE BEAM EXPOSURE APPARATUS, CONTROL METHOD FOR CHARGED PARTICLE BEAM EXPOSURE APPARATUS, AND CHARGED PARTICLE BEAM EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1 SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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