Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/19/2006
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Application #:
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10774623
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Filing Dt:
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02/10/2004
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Publication #:
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Pub Dt:
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12/09/2004
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Inventors:
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Yoshijiro Ushio, Kiyoshi Iizuka
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Title:
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METHOD AND DEVICE FOR SIMULATION, METHOD AND DEVICE FOR POLISHING, METHOD AND DEVICE FOR PREPARING CONTROL PARAMETERS OR CONTROL PROGRAM, POLISHING SYSTEM, RECORDING MEDIUM, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| FUJI BUILDING, 2-3 MARUNOUCHI |
| 3-CHOME |
| CHIYODA-KU, TOKYO, JAPAN |
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| MORGAN LEWIS & BOCKIUS LLP |
| 1111 PENNSYLVANIA AVENUE NW |
| WASHINGTON, DC 20004 |
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