Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/03/2006
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Application #:
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10276673
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Filing Dt:
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11/18/2002
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Publication #:
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Pub Dt:
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09/25/2003
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Inventors:
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Tadahiro Ohmi, Masaki Hirayama, Tetsuya Goto, Shigetoshi Sugawa
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Title:
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PLASMA PROCESSING DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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1-17-301 KOMEGAFUKURO 2-CHOME |
AOBA-KU, SENDAI-SHI, MIYAGI, JAPAN 980-0813 |
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3-6, AKASAKA 5-CHOME, MINATO-KU |
TOKYO 107-8481, JAPAN |
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FINNEGEAN HENDERSON FARABOW ET AL. |
ERNEST F. CHAPMAN |
1300 I STRET, N.W. |
WASHINGTON, D.C. 20005-3315 |
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