Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/03/2006
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Application #:
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10370776
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Filing Dt:
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02/24/2003
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Publication #:
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Pub Dt:
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09/25/2003
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Inventors:
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Yuuki Shiota, Osamu Nozawa, Ryo Ohkubo, Hideaki Mitsui
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Title:
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HALFTONE PHASE SHIFT MASK BLANK, HALFTONE PHASE SHIFT MASK, AND METHOD OF PRODUCING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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7-5, NAKA-OCHIAI 2-CHOME |
SHINJUKU-KU |
TOKYO, JAPAN |
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SUGHRUE MION, PLLC |
ALAN J. KASPER |
2100 PENNSYLVANIA AVENUE, N.W. |
WASHINGTON, DC 20037 |
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