Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/03/2006
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Application #:
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10101076
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Filing Dt:
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03/18/2002
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Publication #:
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Pub Dt:
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08/07/2003
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Inventors:
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Hsieh Yue Ho, Chih-Cheng Wang, Hsiao Shih-Yi, Kang Tsung-Kuei, Bing-Yue Tsui et al
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Title:
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METHOD FOR WET ETCHING OF HIGH K THIN FILM AT LOW TEMPERATURE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 13, TA-TUNG RD. |
| HSINCHU INDUSTRIAL PARK, TAIWAN 300 R |
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| 121 PARK AVE, 3 SCIENCE BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN 300 R |
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| OPPENHEIMER, WOLFF & DONNELLY LLP |
| BRIAN COLEMAN |
| P.O. BOX 10356 |
| PALO ALTO, CALIFORNIA 94303 |
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