Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/24/2006
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Application #:
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10816289
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Filing Dt:
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04/01/2004
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Publication #:
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Pub Dt:
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10/07/2004
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Inventors:
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Bon-Woong Koo, Bjorn O. Pedersen, Jay T. Scheuer, Erik A. Mitchell
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Title:
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WAFER PLATEN EQUIPPED WITH ELECTROSTATIC CLAMP, WAFER BACKSIDE GAS COOLING, AND HIGH VOLTAGE OPERATION CAPABILITY FOR PLASMA DOPING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| MARK SUERKO |
| 35 DORY ROAD |
| GLOUCESTER, MA 01930 |
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