Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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10/31/2006
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Application #:
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11047675
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Filing Dt:
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02/02/2005
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Publication #:
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Pub Dt:
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08/11/2005
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Inventors:
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Tsukasa Sugawara, Akira Fujii
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Title:
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STAGE CONTROL METHOD, A STAGE CONTROL SYSTEM, AND A SEMICONDUCTOR MANUFACTURING EQUIPMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 24-14, NISHI SHINBASHI 1-CHOME, MINATO-KU |
| TOKYO 105-8717, JAPAN |
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| MCDERMOTT WILL & EMERY LLP |
| KEITH E. GEORGE |
| 600 13TH STREET, N.W. |
| WASHINGTON, D.C. 20005-3096 |
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Assignment:
2
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CHANGE OF NAME AND ADDRESS
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| 17-1, TORANOMON 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| MATTINGLY & MALUR PC |
| 1800 DIAGONAL ROAD |
| SUITE 210 |
| ALEXANDRIA, VA 22314 |
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