Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/07/2006
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Application #:
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10817755
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Filing Dt:
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04/02/2004
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Publication #:
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Pub Dt:
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10/13/2005
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Inventors:
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Steven R. Walther, Rajesh Dorai, Harold Persing, Timothy Miller, Jay Scheuer et al
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Title:
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FARADAY DOSE AND UNIFORMITY MONITOR FOR PLASMA BASED ION IMPLANTATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| KEVIN A. OLIVER |
| 155 SEAPORT BOULEVARD |
| SEAPORT WORLD TRADE CENTER WEST |
| BOSTON, MA 02210 |
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