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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
7138629
Issue Dt:
11/21/2006
Application #:
10754623
Filing Dt:
01/12/2004
Publication #:
20050045821
Pub Dt:
03/03/2005
Inventors:
Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama et al
Title:
TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING METHOD USING THE TESTING APPARATUS
Assignment: 1
Reel/Frame:
015867/0227Recorded: 10/07/2004Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
NOJI, NOBUHARU
Exec Dt:
09/28/2004
SATAKE, TOHRU
Exec Dt:
09/28/2004
SOBUKAWA, HIROSI
Exec Dt:
09/28/2004
KIMBA, TOSHIFUMI
Exec Dt:
09/28/2004
HATAKEYAMA, MASAHIRO
Exec Dt:
09/28/2004
YOSHIKAWA, SHOJI
Exec Dt:
09/28/2004
MURAKAMI, TAKESHI
Exec Dt:
09/28/2004
WATANABE, KENJI
Exec Dt:
09/28/2004
KARIMATA, TSUTOMU
Exec Dt:
09/28/2004
SUEMATSU, KENICHI
Exec Dt:
09/28/2004
TABE, YUTAKA
Exec Dt:
09/28/2004
TAJIMA, RYO
Exec Dt:
09/28/2004
TOHYAMA, KEIICHI
Exec Dt:
09/28/2004
Assignee:
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU
TOKYO, JAPAN 3
Correspondent:
WESTERMAN, HATTORI, DANIELS &
ADRIAN, LLP
KEN-ICHI HATTORI
1250 CONNECTICUT AVENUE, N.W., SUITE 700
WASHINGTON, D.C. 20036

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