Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/26/2006
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Application #:
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10523777
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Filing Dt:
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07/08/2005
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Publication #:
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Pub Dt:
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12/29/2005
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Inventors:
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Kun Li, Mark A. Erickson, Ioannis Kanellakopoulos
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Title:
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METHOD AND SYSTEM FOR DYNAMIC MODELING AND RECIPE OPTIMIZATION OF SEMICONDUCTOR ETCH PROCESSES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107, JAPAN |
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| JOSEPH R. JORDAN, ESQ. |
| WOOD, HERRON & EVANS, L.L.P. |
| 2700 CAREW TOWER |
| CINCINNATI, OHIO 45202 |
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