Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/09/2007
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Application #:
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10293661
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Filing Dt:
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11/12/2002
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Inventors:
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Cindy W. Chen, Eddie Chiu, Mavis J. Chaboya, Yuh-Jia Su
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Title:
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ETCH BACK PROCESS APPROACH IN DUAL SOURCE PLASMA REACTORS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4000 FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| K. ALISON DE RUNTZ |
| PARSON HSUE & DE RUNTZ LLP |
| 25 METRO DRIVE, SUITE 700 |
| SAN JOSE, CA 95110 |
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