Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/16/2007
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Application #:
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10733858
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Filing Dt:
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12/10/2003
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Inventors:
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Wenxian Zhu, Jengyi Yu, Siswanto Sutanto, Pinsheng Sun, Jeffrey Chih-Hou Lowe et al
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Title:
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BIASED H2 ETCH PROCESS IN DEPOSITION-ETCH-DEPOSITION GAP FILL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3970 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| BEYER WEAVER & THOMAS LLP |
| P.O. BOX 778 |
| BERKELEY, CA 94704-0778 |
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