Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/23/2007
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Application #:
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11021420
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Filing Dt:
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12/23/2004
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Publication #:
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Pub Dt:
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12/01/2005
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Inventors:
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Anthony Renau, Joseph C. Olson, Donna L. Smatlak, Jun Lu
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Title:
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UNIFORMITY CONTROL USING MULTIPLE TILT AXES, ROTATING WAFER AND VARIABLE SCAN VELOCITY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| HOFFMAN, WARNICK & D'ALESSANDRO LLC |
| 75 STATE STREET, 14TH FLOOR |
| ALBANY, NY 12207 |
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