Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/23/2007
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Application #:
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10546385
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Filing Dt:
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08/18/2005
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Publication #:
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Pub Dt:
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04/13/2006
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Inventor:
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Shigeki Wada
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Title:
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INLINE CONNECTION SETTING METHOD AND DEVICE AND SUBSTRATE PROCESSING DEVICES AND SUBSTRATE PROCESSING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO-TO, JAPAN |
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| MICHAEL A. MAKUCH |
| SMITH, GAMBRELL & RUSSELL, LLP |
| 1850 M STREET, NW - SUITE 800 |
| WASHINGTON, DC 20036 |
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