Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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02/13/2007
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Application #:
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10413137
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Filing Dt:
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04/15/2003
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Publication #:
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Pub Dt:
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10/23/2003
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Inventors:
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Yasumi Sago, Kazuaki Kaneko, Takuji Okada, Masayoshi Ikeda
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Title:
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ELECTROSTATIC CHUCKING STAGE AND SUBSTRATE PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8-1, YOTSUYA 5-CHOME |
| FUCHUOSHI, TOKYO, JAPAN |
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| KANESAKA & TAKEUCHI |
| MANABU KANESAKA |
| 1423 POWHATAN STREET, SUITE 2 |
| ALEXANDRIA, VA 22314 |
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Assignment:
2
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| 8-1, YOTSUYA 5-CHOME, |
| FUCHU-SHI, TOKYO, JAPAN |
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| TROY M. SCHMELZER |
| 1999 AVENUE OF THE STARS |
| SUITE 1400 |
| LOS ANGELES, CA 90067 |
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